High stiffness low mass supporting structure for a mirror assembly
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United States of America Patent
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Dec 21, 2010
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app pub date -
Sep 28, 2007
filing date -
Sep 28, 2007
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Abstract
Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.
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