Polishing compound, method for production thereof, and polishing method

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United States of America Patent

PATENT NO 7854777
APP PUB NO 20040194392A1
SERIAL NO

10831618

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Abstract

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is made possible with low dishing, low erosion and low scratching at a high removal rate.

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Patent Owner(s)

Patent OwnerAddress
ASAHI GLASS COMPANY LIMITED5-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 1008405 ?1008405
SEIMI CHEMICAL CO LTDKANAGAWA KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kon, Yoshinori Yokohama, JP 12 83
Nakazawa, Norihito Yokohama, JP 12 294
Takemiya, Satoshi Yokohama, JP 19 133

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