Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask
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United States of America Patent
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Dec 21, 2010
Issued Date -
N/A
app pub date -
Jul 24, 2007
filing date -
Aug 31, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In a reflecting mask, an apparatus for fixing the reflecting mask and a method of fixing the reflecting mask, voltages are applied to elements of a conductive pattern spaced apart from each other on a rear face of the reflecting mask to fix the reflecting mask by using electrostatic forces. A flatness of the fixed reflecting mask is measured, and the electrostatic forces provided to portions of the reflecting mask are selectively adjusted in accordance with a measured result obtained from the measuring part, such that the reflecting mask is horizontally fixed and is substantially flat.
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