Acoustic wave device physical parameter sensor
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United States of America Patent
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Dec 21, 2010
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app pub date -
Feb 14, 2008
filing date -
Feb 14, 2008
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Abstract
An acoustic wave sensor employs an electromagnetic device (EMD) to transduce and amplify the response of an impedance element to a physical measurand. A measurand is defined as a physical parameter being quantified by measurement. One embodiment uses a magnetic field sensor employing a microelectromechanical system (MEMS) capacitor to affect a change in the response of a SAW filter.
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