Method for treating the surface of object and apparatus thereof
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United States of America Patent
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Dec 28, 2010
Grant Date -
Sep 4, 2008
app pub date -
Oct 31, 2007
filing date -
Nov 14, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for treating the surface of an object to be treated comprising introducing a surface treatment fluid into a reaction vessel (4) capable of receiving an object, introducing the surface treatment fluid into a separation vessel (14) after the object is subjected to surface treatment, and circulating the surface treatment fluid, from which a contaminant has already been removed, to the reaction vessel (4). At the time of treatment on the surface of the object, a circulation passage for the surface treatment fluid including the reaction vessel (4) is communicated and the surface treatment fluid is constantly circulated through the circulation passage.
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