Pressure measurement using a MEMS device
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United States of America Patent
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Dec 28, 2010
Grant Date -
Dec 24, 2009
app pub date -
Jun 18, 2008
filing date -
Jun 18, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and indicative of the ambient pressure about the device.
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