Methods of reducing CD loss in a microelectromechanical device

United States of America Patent

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Jan 4, 2011
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Aug 6, 2009
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Feb 5, 2008
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Feb 5, 2008

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Abstract

Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.

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SNAPTRACK, INC.

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Chui, Clarence	San Jose, US	259	8761
Gudlavalleti, Sauri	San Jose, US	21	265
Kothari, Manish	Cupertino, US	215	7372

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Methods of reducing CD loss in a microelectromechanical device

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United States of America Patent

12026131

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PATENT NO	7863079
APP PUB NO	20090195856A1
SERIAL NO	12026131
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 04, 2011	US,7863079,B2 US7863079B2	GRANTED PATENT AS SECOND PUBLICATION
August 06, 2009	US,20090195856,A1 US20090195856A1	FIRST PUBLISHED PATENT APPLICATION

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12026131

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