Post-release adjustment of interferometric modulator reflectivity
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United States of America Patent
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Jan 4, 2011
Grant Date -
Sep 30, 2010
app pub date -
Mar 27, 2009
filing date -
Mar 27, 2009
priority date (Note) -
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Abstract
In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.
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