Spin head and substrate treating method using the same
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United States of America Patent
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Jan 11, 2011
Issued Date -
N/A
app pub date -
Aug 30, 2007
filing date -
Aug 30, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
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