PCVD apparatus with a choke defined within a microwave applicator
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United States of America Patent
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Jan 11, 2011
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N/A
app pub date -
Dec 30, 2004
filing date -
Dec 30, 2003
priority date (Note) -
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Abstract
The present invention relates to an apparatus for carrying out a PCVD deposition process, wherein one or more doped or undoped layers are coated onto the interior of a glass substrate tube, which apparatus comprises an applicator having an inner and an outer wall and a microwave guide which opens into the applicator, which applicator extends around a cylindrical axis and which is provided with a passage adjacent to the inner wall, through which the microwaves can exit, over which cylindrical axis the substrate tube can be positioned, and wherein at least one choke of annular shape having a length l and a width w is centred around the cylindrical axis within the applicator.
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