Process control monitors for interferometric modulators
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 11, 2011
Grant Date -
Jan 3, 2008
app pub date -
Aug 20, 2007
filing date -
Sep 27, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully