Substrate support lift mechanism
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United States of America Patent
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Jan 18, 2011
Issued Date -
N/A
app pub date -
Jun 26, 2006
filing date -
Mar 12, 2003
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.
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