Process for the refurbishing of a sputtering target
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United States of America Patent
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Jan 18, 2011
Issued Date -
N/A
app pub date -
Jul 15, 2008
filing date -
Jul 17, 2007
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Abstract
Disclosed in this specification is a process for refurbishing a spent sputtering target. The process includes the step of applying sufficient heat and axial force to the filled sputtering target to hot press the filled sputtering target such that the powdered metal fuses with the un-sputtered metal, producing a refurbished target. The process may be used to refurbish precious metal targets, such as ruthenium targets.
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