Method and system for high-speed, precise micromachining an array of devices
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United States of America Patent
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Jan 18, 2011
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app pub date -
Dec 22, 2009
filing date -
Mar 27, 2002
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Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.
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