
US Patent No: 7,875,486
Number of patents in Portfolio can not be more than 2000
Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning
Stats
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Jan 25, 2011
Issued date -
Jul 9, 2008
filing date -
12/170,387
serial no -
In Force
status
Importance
Abstract
Embodiments of the present invention generally provide an apparatus and method for forming an improved thin film single or multi-junction solar cell in a substrate processing device. One embodiment provides a system that contains at least one processing chamber that is adapted to deposit one or more layers that form a portion of a solar cell device. In one embodiment, a method is employed to reduce the contamination of a substrate processed in the processing chamber by performing a cleaning process on the inner surfaces of the processing chamber prior to depositing the one or more layers on a substrate. The cleaning process may include depositing a layer, such as a seasoning layer or passivation layer, that tends to trap contaminants found in the processing chamber. Other embodiments of the invention may provide scheduling and/or positioning the cleaning processing steps at desirable times within a substrate processing sequence to improve the overall system substrate throughput.
First Claim
Related Publications
International Classification(s)
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- [Patents Count]
Cited Art
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Patent Citation Ranking
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