Differential waveguide probe

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United States of America Patent

PATENT NO 7876114
APP PUB NO 20090189623A1
SERIAL NO

12221828

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A wafer probe comprises a contact conductively interconnected with the wall of a waveguide channel and supported by a substrate that projects from an end of a waveguide channel.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Michael Hillsboro, US 109 1821
Campbell, Richard L Portland, US 15 943

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