Apparatus for manufacturing flat-panel display

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United States of America Patent

PATENT NO 7879181
APP PUB NO 20090078200A1
SERIAL NO

12324256

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED DISPLAY PROCESS ENGINEERING CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Hyun Hwan Sungnam-shi, KR 9 189
Ahn, Sung Il ChungCheongNam-do, KR 8 65
Choi, Jun Young Seoul, KR 103 402
Jo, Saeng Hyun Daejeon, KR 9 108
Lee, Young Jong Sungnam-shi, KR 48 311
Son, Suk-Min Daejeon, KR 4 47

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