Lithographic apparatus and method for calibrating the same
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United States of America Patent
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Feb 1, 2011
Grant Date -
Sep 2, 2010
app pub date -
May 17, 2010
filing date -
Jul 27, 2004
priority date (Note) -
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Abstract
A method for calibrating an encoder in a lithographic apparatus, the encoder including a sensor and a grating, the encoder configured to measure a position of a moveable support of the lithographic apparatus, the method including measuring a position of the moveable support using an interferometer; and calibrating the encoder based on the position of the moveable support measured by the interferometer.
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