Mirror device with an anti-stiction layer
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United States of America Patent
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-
Feb 1, 2011
Grant Date -
Sep 17, 2009
app pub date -
May 2, 2008
filing date -
May 3, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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