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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325 107-6325

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Moriya, Tsuyoshi	Yamanashi, JP	154	1601
Nakayama, Hiroyuki	Yamanashi, JP	238	3061

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 08, 2011	US,7883779,B2   US7883779B2	GRANTED PATENT AS SECOND PUBLICATION
June 21, 2007	US,20070137792,A1   US20070137792A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7883779

Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring

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