Probing apparatus with impedance optimized interface

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United States of America Patent

PATENT NO 7888957
SERIAL NO

12287213

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Abstract

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In a membrane probing apparatus, the impedance of the interface between coaxial cables connected to the test instrumentation and the membrane supported co-planar waveguide that conductively connects to the probe's contacts is optimized by eliminating a ground plane in the interface board.

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Patent Owner(s)

Patent OwnerAddress
FORMFACTOR INC7005 SOUTHFRONT ROAD LIVERMORE CA 94551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayward, Roger Beaverton, US 12 348
Smith, Kenneth R Portland, US 111 3422

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