Fuel cell planarly integrated on a monocrystalline silicon chip and process of fabrication
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United States of America Patent
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Feb 22, 2011
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app pub date -
Dec 15, 2006
filing date -
Dec 16, 2005
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Abstract
A fuel cell is entirely fabricated on a single monocrystalline silicon substrate, and substantially overcomes leak proofing and wafer bonding difficulties and criticalities while ensuring an intrinsic sturdiness of the planarly integrated functional structure of the fuel cell. The integrated fuel cell is formed in an oxidized porous silicon region on a monocrystalline silicon substrate that is pervious to fluid flow and is electrically nonconductive with the monocrystalline silicon substrate.
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