Flowmeter
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United States of America Patent
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Mar 1, 2011
Grant Date -
Dec 17, 2009
app pub date -
Dec 15, 2008
filing date -
Jan 11, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
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