Re-assembly process for MEMS structures
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United States of America Patent
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Mar 1, 2011
Grant Date -
Sep 21, 2006
app pub date -
May 25, 2006
filing date -
Apr 10, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Methods of fabricating an array of aligned microstructures on a substrate are disclosed. The microstructures may be spring contacts or other microelements. The methods disclosed include construction of an alignment substrate, alignment of die elements with the alignment substrate, and fixation of the aligned die elements to a backing substrate.
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