Using an interferometer as a high speed variable attenuator

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Mar 1, 2011
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May 8, 2008
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Oct 3, 2007
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Oct 17, 2006

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Abstract

A system and method provides high speed variable attenuators. The attenuators can be used within a lithographic apparatus to control intensity of radiation in one or more correction pulses used to correct a dose of the radiation following an initial pulse of radiation.

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ASML NETHERLANDS B V	5500 AH VELDHOVEN
ASML HOLDING N V	HOLLAND WEIDE EINDHOVEN

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Inventor Name	Address	# of filed Patents	Total Citations
Kreuzer, Justin L	Trumbull, US	26	644
Noordman, Oscar Franciscus Jozephus	Eindhoven, NL	14	63
Perez, Calero Daniel	Amsterdam, NL	7	44
Van, Den Dool Teunis Cornelis	Delft, NL	28	310
Vink, Henri Johannes Petrus	The Hague, NL	13	81

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Using an interferometer as a high speed variable attenuator

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United States of America Patent

11866820

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PATENT NO	7898646
APP PUB NO	20080106717A1
SERIAL NO	11866820
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 01, 2011	US,7898646,B2 US7898646B2	GRANTED PATENT AS SECOND PUBLICATION
May 08, 2008	US,20080106717,A1 US20080106717A1	FIRST PUBLISHED PATENT APPLICATION

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11866820

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