Defect classification utilizing data from a non-vibrating contact potential difference sensor
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United States of America Patent
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Mar 8, 2011
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Jun 4, 2009
app pub date -
Nov 30, 2007
filing date -
Nov 30, 2007
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Abstract
A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.
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