Planar voltage contrast test structure
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United States of America Patent
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Mar 8, 2011
Grant Date -
Apr 19, 2007
app pub date -
Nov 9, 2006
filing date -
Nov 6, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An integrated circuit and e-beam testing method are disclosed. The integrated circuit includes a test structure with a ground grid, a metal pad having a space therein and positioned within the ground grid, and a metal line connected to the ground grid and positioned in the space. Structures for detecting open circuits and short circuits are described.
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