Device with flow sensor for handling fluids
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 15, 2011
Grant Date -
Sep 4, 2008
app pub date -
Jan 21, 2008
filing date -
Mar 1, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A channel substrate containing at least one channel for a fluid is provided. A sensor substrate carrying a thermal flow sensor is arranged adjacent to the channel substrate. The flow sensor contains at least one temperature sensor and at least one heater, which are integrated on the sensor substrate. The heater and the temperature sensor are in thermal contact with the channel in the channel substrate. This arrangement allows to measure the flow of the fluid in the channel, which provides an improved monitoring and control. The sensor substrate can have contact pads connected to bond wires or, using flip-chip technology, the contact pads can be connected to circuit paths to the channel substrate.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully