Compact scanning electron microscope

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United States of America Patent

PATENT NO 7906762
SERIAL NO

12303611

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Abstract

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A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
FEI COMPANYHILLSBORO, OR533

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Steven Newburyport, US 11 154
Bierhoff, Mart Petrus Maria Deurne, NL 5 43
Bormans, Ben Jacobus Marie Asten, NL 5 52
Buijsse, Bart Eindhoven, NL 28 200
Driessen, Koen Arnoldus Wilhelmus Valkenswaard, NL 5 52
Kooijman, Cornelis Sander Veldhoven, NL 24 278
Leeuwen, Hugo Van Eindhoven, NL 1 10
Persoon, Johannes Antonius Hendricus Wilhelmus Gerardus Waalre, NL 4 16
Sanford, Colin August Atkinson, US 11 108
Stoks, Sander Richard Marie Nijmegen, NL 8 88
Tappel, Hendrik Gezinus Casteren, NL 13 180

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