Importance

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Abstract

An apparatus and method are provided for testing a semiconductor device (DUT). Generally, the apparatus includes an interface board with conductive elements adapted to electrically couple with the DUT and connected to a number of test circuits. Each test circuit resides on one of a number of daughter cards on the interface board, and provides test input signals to and receives output signals from the DUT to generate a result based on a program loaded to the daughter cards before testing begins. The apparatus further includes a controller to drive the interface board and store test results. In one embodiment, the interface board is a load board for back end testing. In another embodiment, the interface board is a probe card for front end testing. Preferably, the apparatus is capable of testing DUTs including memory arrays, logic circuits or both, and the daughter cards are capable of being re-programmed and re-used on different DUTs.

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First Claim