Method of making an integrated circuit including electrodeposition of metallic chromium
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United States of America Patent
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Mar 22, 2011
Grant Date -
Oct 23, 2008
app pub date -
Apr 19, 2007
filing date -
Apr 19, 2007
priority date (Note) -
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Abstract
A method of making an integrated circuit including a composition of matter for electrodepositing of chromium is disclosed. One embodiment provides a bath having a solution of a chromium salt in a substantially anhydrous organic solvent, to uses of certain chromium salts for electrodepositing and to processes for electrodepositing chromium.
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