Method of producing a layer arrangement, method of producing an electrical component, layer arrangement, and electrical component
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United States of America Patent
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Mar 22, 2011
Grant Date -
May 31, 2007
app pub date -
Nov 20, 2006
filing date -
Nov 25, 2005
priority date (Note) -
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Abstract
In a method of producing a layer arrangement, a substantially carbon-comprising, electrically conductive carbon layer is formed. A protective layer is formed on the carbon layer. An electrically insulating layer is formed on the protective layer, the protective layer protecting the carbon layer from damage during the formation of the electrically insulating layer. Furthermore, a layer arrangement is provided, having a substantially carbon-comprising, electrically conductive carbon layer, a protective layer formed on the carbon layer, and an electrically insulating layer formed on the protective layer, the protective layer being used to avoid damage to the carbon layer by the electrically insulating layer.
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