Method for reuse of wafers for growth of vertically-aligned wire arrays

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United States of America Patent

PATENT NO 7910461
APP PUB NO 20090061600A1
SERIAL NO

12176100

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Abstract

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Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

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Patent Owner(s)

Patent OwnerAddress
CALIFORNIA INSTITUTE OF TECHNOLOGY1200 E CALIFORNIA BOULEVARD M/C 201-85 PASADENA CA 91125

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atwater, Harry A S. Pasadena, US 110 1453
Lewis, Nathan S La Canada, US 103 3602
Plass, Katherine E Lancaster, US 4 47
Spurgeon, Joshua M Pasadena, US 13 138

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