Fabry-Perot piezoelectric tunable filter
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United States of America Patent
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Mar 22, 2011
Grant Date -
Feb 12, 2009
app pub date -
Aug 7, 2007
filing date -
Aug 7, 2007
priority date (Note) -
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Abstract
Disclosed is a microelectromechanically tunable Fabry-Perot device and method of manufacturing tunable Fabry-Perot device and method of manufacturing. The F-P device comprises a first and second substrate which has partially reflective planar surfaces, and the partially reflective planar surfaces are separated by a predetermined separation distance and aligned to provide a F-P cavity, where one or more piezoelectric members are adapted to displace the first and second substrates when an electric field is applied.
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