Micromirror device having a vertical hinge
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United States of America Patent
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Mar 22, 2011
Issued Date -
N/A
app pub date -
Feb 20, 2009
filing date -
Nov 1, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described.
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