Capacitive microphone and method for making the same
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United States of America Patent
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Mar 22, 2011
Grant Date -
Jul 5, 2007
app pub date -
Oct 3, 2006
filing date -
Dec 30, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A capacitive microphone and method for making the same are provided. A backplate with a plurality of holes is formed on a substrate with at least one cavity, and a diaphragm is formed above the backplate. There is an air gap between the backplate and the diaphragm. The air gap and the cavity communicate with each other by each hole. The diaphragm and the backplate are separated by a first distance and a second distance which is smaller than the first distance, such that the difference is formed on the diaphragm. The second distance area is fastened through surface stiction produced by mist or other fluids.
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