Slit coater having pre-applying unit and coating method using the same
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United States of America Patent
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Mar 29, 2011
Grant Date -
Jul 6, 2006
app pub date -
Aug 19, 2005
filing date -
Dec 31, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A slit coater having a pre-applying unit and a coating method using the same that minimizes the amount of washing solution used and improves the washing effectiveness of a roller by separating the coating solution attached to a pre-applying roller from the washing solution using a coating solution separating apparatus. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle applying coating solution onto a surface of the object; a pre-applying unit to which the slit nozzle pre-applies the coating solution; and a coating solution separating unit that separates the coating solution spread when the coating solution is pre-applied to the slit nozzle and discharges the separated coating solution.
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