Conveying device using electrostatic adsorbing plate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7918329
APP PUB NO 20100133070A1
SERIAL NO

11990167

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Abstract

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Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.

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Patent Owner(s)

Patent OwnerAddress
SEIREN CO LTD10-1 KEYA 1-CHOME FUKUI-SHI FUKUI 9188560 ?9188560

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Araie, Hidemasa Fukui, JP 2 8
Takagi, Susumu Fukui, JP 28 222
Takashima, Kenichi Fukui, JP 3 10

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