Electromechanical device with optical function separated from mechanical and electrical function
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United States of America Patent
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Apr 5, 2011
Grant Date -
Apr 8, 2010
app pub date -
Dec 3, 2009
filing date -
Jul 2, 2007
priority date (Note) -
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
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