Method of measuring length of measurement object article in micro-structure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 12, 2011
Grant Date -
Sep 28, 2006
app pub date -
Feb 3, 2006
filing date -
Feb 10, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully