Drive method for MEMS devices

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United States of America Patent

PATENT NO 7928940
APP PUB NO 20070024550A1
SERIAL NO

11511908

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of exemplary MEMS interferometric modulators are arranged at intersections of rows and columns of electrodes. In certain embodiments, the column electrode has a lower electrical resistance than the row electrode. A driving circuit applies a potential difference of a first polarity across electrodes during a first phase and then quickly transition to applying a bias voltage having a polarity opposite to the first polarity during a second phase. In certain embodiments, an absolute value of the difference between the voltages applied to the row electrode is less than an absolute value of the difference between the voltages applied to the column electrode during the first and second phases.

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Patent Owner(s)

  • SNAPTRACK, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Mateo, US 271 8883
Kothari, Manish Cupertino, US 217 7602
Mathew, Mithran C Mountain View, US 13 416
Mignard, Marc San Jose, US 46 1197
Sampsell, Jeffrey B San Jose, US 165 16373

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