Exposure chuck comprising a surface of a lift bar having a concavo-convex structure
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United States of America Patent
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Apr 19, 2011
Issued Date -
N/A
app pub date -
Jun 28, 2005
filing date -
Jun 30, 2004
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An exposure chuck includes a lift bar to transfer a substrate; a lift bar mounting unit including the lift bar to move the substrate; and a substrate loading unit to load the substrate as the lift bar in the lift bar mounting unit transfers the substrate such that the substrate is separated from the lift bar, wherein a surface of the lift bar contacting the substrate has a concavo-convex structure.
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