Method to control an atmosphere between a body and a substrate

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United States of America Patent

PATENT NO 7931846
APP PUB NO 20100119637A1
SERIAL NO

12688190

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Abstract

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Systems to control an atmosphere about a substrate are described. The systems include a wall coupled to the substrate to create a resistance of the flow between different regions of the substrate.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A388 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Byung-Jin Austin, US 194 2163
Choi, Yeong-Jun Cedar Park, US 11 181

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