Test structure to monitor the release step in a micromachining process

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Apr 26, 2011
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Oct 1, 2009
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Mar 31, 2008
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Mar 31, 2008

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Abstract

Electrical and visual test structures monitor the degree of removal of conductive sacrificial layers used in micromachining processes that fabricate micro-electromechanical systems (MEMS).

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WSOU INVESTMENTS LLC	11150 SANTA MONICA BLVD SUITE 1400 LOS ANGELES CA 90025

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Inventor Name	Address	# of filed Patents	Total Citations
Bolle, Christian	Bridgewater, US	3	25
Pardo, Flavio	New Providence, US	39	384

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Test structure to monitor the release step in a micromachining process

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United States of America Patent

12058859

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PATENT NO	7932727
APP PUB NO	20090243625A1
SERIAL NO	12058859
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 26, 2011	US,7932727,B2 US7932727B2	GRANTED PATENT AS SECOND PUBLICATION
October 01, 2009	US,20090243625,A1 US20090243625A1	FIRST PUBLISHED PATENT APPLICATION

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