US Patent No: 7,936,497

Number of patents in Portfolio can not be more than 2000

MEMS device having deformable membrane characterized by mechanical persistence

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ALSO PUBLISHED AS: 20060077156
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Kothari, Manish Cupertino, CA 262 2930

Cited Art

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (134)
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4,441,791 Deformable mirror light modulator 589 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 208 1982
4,571,603 Deformable mirror electrostatic printer 348 1984
4,566,935 Spatial light modulator and method 477 1984
4,710,732 Spatial light modulator and method 468 1984
4,596,992 Linear spatial light modulator and printer 361 1984
4,615,595 Frame addressed spatial light modulator 377 1984
4,662,746 Spatial light modulator and method 471 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 272 1988
4,956,619 Spatial light modulator 553 1988
5,079,544 Standard independent digitized video system 334 1989
5,028,939 Spatial light modulator system 369 1989
4,954,789 Spatial light modulator 525 1989
5,037,173 Optical interconnection network 302 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 291 1990
5,083,857 Multi-level deformable mirror device 514 1990
5,142,405 Bistable DMD addressing circuit and method 321 1990
5,061,049 Spatial light modulator and method 703 1990
5,192,395 Method of making a digital flexure beam accelerometer 194 1990
5,096,279 Spatial light modulator and method 474 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 305 1991
5,226,099 Digital micromirror shutter device 350 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 240 1991
5,170,156 Multi-frequency two dimensional display system 244 1991
5,192,946 Digitized color video display system 307 1991
5,214,419 Planarized true three dimensional display 248 1991
5,214,420 Spatial light modulator projection system with random polarity light 285 1991
5,206,629 Spatial light modulator and memory for digitized video display 241 1991
5,179,274 Method for controlling operation of optical systems and devices 222 1991
5,168,406 Color deformable mirror device and method for manufacture 269 1991
5,254,980 DMD display system controller 232 1991
5,563,398 Spatial light modulator scanning system 190 1991
5,233,385 White light enhanced color field sequential projection 347 1991
5,233,456 Resonant mirror and method of manufacture 291 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 364 1992
5,331,454 Low reset voltage process for DMD 337 1992
5,296,950 Optical signal free-space conversion board 220 1992
5,231,532 Switchable resonant filter for optical radiation 233 1992
5,212,582 Electrostatically controlled beam steering device and method 336 1992
5,312,513 Methods of forming multiple phase light modulators 261 1992
5,172,262 Spatial light modulator and method 374 1992
5,305,640 Digital flexure beam accelerometer 178 1992
5,446,479 Multi-dimensional array video processor system 243 1992
5,818,095 High-yield spatial light modulator with light blocking layer 287 1992
5,272,473 Reduced-speckle display system 265 1992
5,327,286 Real time optical correlation system 262 1992
5,287,096 Variable luminosity display system 259 1992
5,325,116 Device for writing to and reading from optical storage media 246 1992
5,280,277 Field updated deformable mirror device 310 1992
5,506,597 Apparatus and method for image projection 274 1992
5,457,566 DMD scanner 233 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 333 1993
5,461,411 Process and architecture for digital micromirror printer 282 1993
5,452,138 Deformable mirror device with integral color filter 131 1993
5,323,002 Spatial light modulator based optical calibration system 259 1993
5,489,952 Method and device for multi-format television 308 1993
5,365,283 Color phase control for projection display using spatial light modulator 272 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 381 1993
5,581,272 Signal generator for controlling a spatial light modulator 186 1993
5,457,493 Digital micro-mirror based image simulation system 290 1993
5,411,769 Method of producing micromechanical devices 251 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 270 1993
5,526,051 Digital television system 239 1993
5,459,602 Micro-mechanical optical shutter 209 1993
5,452,024 DMD display system 389 1993
5,497,197 System and method for packaging data into video processor 223 1993
5,517,347 Direct view deformable mirror device 283 1993
5,583,688 Multi-level digital micromirror device 441 1993
5,448,314 Method and apparatus for sequential color imaging 392 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 265 1994
5,606,441 Multiple phase light modulation using binary addressing 210 1994
5,444,566 Optimized electronic operation of digital micromirror devices 345 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 284 1994
5,526,688 Digital flexure beam accelerometer and method 198 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 265 1994
6,061,075 Non-systolic time delay and integration printing 174 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 272 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 250 1994
5,548,301 Pixel control circuitry for spatial light modulator 233 1994
5,650,881 Support post architecture for micromechanical devices 250 1994
5,552,924 Micromechanical device having an improved beam 237 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 194 1994
5,659,374 Method of repairing defective pixels 197 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 230 1995
6,049,317 System for imaging of light-sensitive media 235 1995
5,610,438 Micro-mechanical device with non-evaporable getter 284 1995
5,515,076 Multi-dimensional array video processor system 239 1995
6,232,936 DMD Architecture to improve horizontal resolution 203 1995
5,535,047 Active yoke hidden hinge digital micromirror device 438 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 224 1995
5,619,366 Controllable surface filter 218 1995
5,551,293 Micro-machined accelerometer array with shield plane 208 1995
5,570,135 Method and device for multi-format television 206 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 261 1995
5,597,736 High-yield spatial light modulator with light blocking layer 233 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 380 1995
5,608,468 Method and device for multi-format television 231 1995
5,610,625 Monolithic spatial light modulator and memory package 176 1995
5,614,937 Method for high resolution printing 44 1995
5,646,768 Support posts for micro-mechanical devices 288 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 205 1995
6,099,132 Manufacture method for micromechanical devices 200 1995
6,447,126 Support post architecture for micromechanical devices 317 1995
5,657,099 Color phase control for projection display using spatial light modulator 199 1995
5,661,591 Optical switch having an analog beam for steering light 164 1995
5,654,741 Spatial light modulator display pointing device 184 1995
5,784,212 Method of making a support post for a micromechanical device 225 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 267 1996
5,842,088 Method of calibrating a spatial light modulator printing system 244 1997
6,624,944 Fluorinated coating for an optical element 85 1997
5,808,780 Non-contacting micromechanical optical switch 222 1997
5,912,758 Bipolar reset for spatial light modulators 195 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 183 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,282,010 Anti-reflective coatings for spatial light modulators 270 1999
6,323,982 Yield superstructure for digital micromirror device 252 1999
6,295,154 Optical switching apparatus 284 1999
6,147,790 Spring-ring micromechanical device 230 1999
6,038,056 Spatial light modulator having improved contrast ratio 252 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 182 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 111 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 143 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 202 2000
6,552,840 Electrostatic efficiency of micromechanical devices 228 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 204 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 173 2001
6,778,155 Display operation with inserted block clears 172 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 209 2001
6,775,174 Memory architecture for micromirror cell 173 2001
6,625,047 Micromechanical memory element 238 2001
6,741,503 SLM display data address mapping for four bank frame buffer 172 2002
6,959,990 Prism for high contrast projection 46 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (54)
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6,040,937 Interferometric modulation 573 1996
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6,055,090 Interferometric modulation 423 1999
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6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
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6,747,800 Optical interference type panel and the manufacturing method thereof 143 2003
6,912,022 Optical interference color display and optical interference modulator 227 2003
6,982,820 Color changeable pixel 144 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 188 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
6,958,847 Structure of an optical interference display unit 198 2004
7,307,776 Optical interference display panel 14 2004
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2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
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2005/0249,966 Method of manufacture for microelectromechanical devices 125 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
2006/0007,517 Structure of a micro electro mechanical system 80 2004
2006/0066,640 Display region architectures 66 2005
2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 61 2005
2006/0079,048 Method of making prestructure for MEMS systems 65 2005
2006/0065,940 Analog interferometric modulator device 72 2005
2006/0077,152 Device and method for manipulation of thermal response in a modulator 47 2005
2006/0066,936 Interferometric optical modulator using filler material and method 49 2005
7,236,284 Photonic MEMS and structures 82 2005
2006/0268,388 Movable micro-electromechanical device 50 2006
2006/0262,126 Transparent thin films 41 2006
2006/0262,380 MEMS devices with stiction bumps 63 2006
2007/0177,247 Method and device for modulating light with multiple electrodes 74 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 53 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 81 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 81 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 75 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 78 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 48 2008
2009/0080,060 SEPARABLE MODULATOR 49 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 41 2009
7,852,544 Separable modulator 31 2010
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (14)
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6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
2003/0202,264 Micro-mirror device 193 2002
6,747,785 MEMS-actuated color light modulator and methods 206 2002
6,666,561 Continuously variable analog micro-mirror device 212 2002
2004/0147,056 Micro-fabricated device and method of making 179 2003
6,829,132 Charge control of micro-electromechanical device 200 2003
6,811,267 Display system with nonvisible data projection 209 2003
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