Substrate cleaning chamber and components
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United States of America Patent
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May 17, 2011
Grant Date -
Dec 4, 2008
app pub date -
Sep 19, 2007
filing date -
May 30, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring.
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