Electromechanical device with optical function separated from mechanical and electrical function
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United States of America Patent
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May 17, 2011
Grant Date -
Jan 17, 2008
app pub date -
Jul 2, 2007
filing date -
Sep 27, 2004
priority date (Note) -
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Abstract
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
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