Microelectromechanical device and method utilizing a porous surface
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United States of America Patent
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May 17, 2011
Grant Date -
Sep 11, 2008
app pub date -
May 13, 2008
filing date -
Apr 19, 2006
priority date (Note) -
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Abstract
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode having a first surface; and a movable reflective electrode with a second surface facing the first surface. The movable reflective electrode is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer which has a porous surface. The porous surface, in the actuated position, decreases contact area between the electrodes, thus reducing stiction.
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