Multiple beam micro-machining system and method

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United States of America Patent

PATENT NO 7947922
SERIAL NO

12350510

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Abstract

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A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.

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Patent Owner(s)

Patent OwnerAddress
ORBOTECH LTD8110101 YAVNE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alon, Dan Mizpe Yericho, IL 12 136
Gross, Abraham Ramat Aviv, IL 35 462
Kotler, Zvi Tel Aviv, IL 49 618
Lipman, Eliezer Rishon Lezion, IL 15 197

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