Flash memory device and method for manufacturing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 24, 2011
Grant Date -
May 28, 2009
app pub date -
Jan 29, 2009
filing date -
Jun 27, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A flash memory device, and a manufacturing method thereof, having advantages of protecting sidewalls of a floating gate and a control gate and preventing a recess of an active area of a source region are provided. The method includes forming a tunneling oxide layer on an active region of a semiconductor substrate, forming a floating gate, a gate insulation layer, and a control gate on the tunneling oxide layer, forming insulation sidewall spacers on sides of the floating gate and the control gate, and removing at least portions of the tunneling oxide layer and the device isolation layer so as to expose the active region.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully